Applications

  • Non-contact surface measurements and characterization of micro and nano-scale surface features.

Specifications and Features

  • White light interferometer.
  • 5x, 10x, and 20x magnifying objectives.
  • 640x480 digital camera; ZeMaps data acquisition software.
  • 3D display and data processing software.
  • Nanometer level vertical precision.
  • Ability to stitch maps for larger feature measurement.