The Atami facility includes a wide mix of analytical capability including gas chromatography, density analysis and GC mass spec. The tools are used for OSU research, tenant process control and consulting services.
Micrometrics Accupyc II 1340 Density Analyzer
Coming in 2020, after Covid-19 restrictions are reduced – Automatic Helium gas displacement is used to accurately measure volume and object density. This unit is fitted with a 1 cubic centimeter chamber and has a 0.1 cubic centimeter cup. A simple Windows interface can be used for collecting and analyzing data.
Thermo Fisher Nicolet IS50 FT-IR FTIR
Dual sources for mid and far IR spectroscopy, with built-in ATR for fast analysis of powders, liquids, gels and pastes. A wafer stage for automated measurements at multiple points on the surface. A powerful analytical tool for chemical, pharmaceutical, materials analysis and Si wafer based materials analysis.
SRS CIS 200 sputter system RGA
A quadrapole mass spec with 1 to 100 amu range. Better than 0.5 amu at 10% peak height. Minimum detectable partial pressure of 5 x 10-11 Torr. Attached to to the Aja sputter system and used for process gas analysis associated with sputter film deposition development.
