Jandel 4-pt Probe

Applications

• Semiconductor material resistivity measurements - bulk, sheet,...

ATAMI Links

• Atami Usage and Service Rates
• Atami Capabilities Training

Specifications and Features

• Jandel 4-point probe with RM3000 test unit.
• Up to 250mm wafer.  Also samples of varying height.
• Tungsten-carbide probe tips, 1mm probe spacing, 100 micron needle radius.
• RM3000 measurement range: 1 mohm/square to 500 Mohm/square.  
• RM3000 auto-ranging to set optimum current.
• RM3300 current range 10nA – 99.99mA.

Documents and Links

• Standard Operating Procedure
• Supplier website (Jandel)

• Excellent Technical Background Reference from Jandel
• Four Point Probe Equations (ECE Illinois)
• Materials Characterization: Resistivity measurements using a four-point collinear probe (Evaluation Engineering)