Applications
- Non-contact surface measurements and characterization of micro and nano-scale surface features.
Specifications and Features
- White light interferometer.
- 5x, 10x, and 20x magnifying objectives.
- 640x480 digital camera; ZeMaps data acquisition software.
- 3D display and data processing software.
- Nanometer level vertical precision.
- Ability to stitch maps for larger feature measurement.
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