Applications
- Characterize both thickness and refractive index for single and multi-layer optical coatings
- Semiconductor materials analysis (resists, masks, dielectrics,...)
- General film characterization
Specifications and Features
- Wavelength range: 240-1000 nm
- Automated 150x150 mm, mapping stage
- Focusing optics to 60 um beam size
- Camera
- ND filter wheel
- FLS source, single receiver
Documents and Links
- Standard Operating Procedure
- Supplier website
- Ellipsometry Tutorial by JA Woolum
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