This coater is primarily used for SEM sample prep. It can deposit Au/Pd films down to a few A thick.
Applications
- Depositing very thin Au/Pd conducting films
- SEM sample prep
Specifications and Features
- 150mm chamber size
- Rotary-planetary-tilt stage
- Variable height, 165mm - 250 mm
- Automatic and manual deposition recipes
- Low voltage, planar magnatron sputter head
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