Capability
Surface Treatment
Make/Model
AJA
Purpose
Sputtering of metal and dielectric thin films
Notes
Download Standard Operating Procedures (.pdf)
- Sputter down configuration
- Load lock
- DC and RF power supplies
- Substrate heating and bias
Image
Hourly Rates
OSU / Non-OSU: $47 / $94
Training
See trainer and contact information on the ATAMI Capabilities Training Staff page.