This coater is primarily used for SEM sample prep.  It can deposit Au/Pd films down to a few A thick.


  • Depositing very thin Au/Pd conducting films
  • SEM sample prep

Specifications and Features

  • 150mm chamber size
  • Rotary-planetary-tilt stage
  • Variable height, 165mm - 250 mm
  • Automatic and manual deposition recipes
  • Low voltage, planar magnatron sputter head