Applications

  • Characterize both thickness and refractive index for single and multi-layer optical coatings
  • Semiconductor materials analysis (resists, masks, dielectrics,...)
  • General film characterization

Specifications and Features

  • Wavelength range: 240-1000 nm
  • Automated 150x150 mm, mapping stage
  • Focusing optics to 60 um beam size
  • Camera
  • ND filter wheel
  • FLS source, single receiver

 

Documents and Links