Applications

  • Thin film thickness and properties measurement (n and k).
  • Generally on Si or glass slides, but can be other substrates.
  • Monitor thin film stack properties.
  • Build custom thin film measurement recipes for your samples.

Specifications and Features

  • Thickness range: 15nm-250um
  • Wavelength range: 380-1700 nm
  • Flattening filter (for highly reflective substrates)
  • Integrated spectrometer/light source unit
  • FILMeasure 9 software
  • SS-3 sample stage with fiber optic cable
  • Reflectance and thickness standards
  • Library with over 130 materials, along with access to 100's more
  • Output data to CSV files, images, ....

 

Documents and Links