The Atami facility includes a wide mix of analytical capability including gas chromatography, TGA/DSC, density analysis and GC mass spec.   The tools are used for OSU research, tenant process control and consulting services.

Micrometrics Accupyc II 1340 Density Analyzer

Coming in 2020, after Covid-19 restrictions are reduced – Automatic Helium gas displacement is used to accurately measure volume and object density.  This unit is fitted with a 1 cubic centimeter chamber and has a 0.1 cubic centimeter cup.  A simple Windows interface can be used for collecting and analyzing data.

 
TA Instruments Q600 TGA/DSC with in-line MS

ThermoGravimetric Analysis / Differential Scanning Calorimetry (TGA/DSC) is a technique that simultaneously measures heat flow and weight changes in materials as a function of temperature or time under controlled gas environments (N2, O2, Ar).  This system is used to characterize a wide variety of materials (powders, solids, polymers, liquids and solids) by using a variety of sample pans in the horizontal balance and furnace arrangement, with a maximum operating temperature of 1500°C.

 
Hiden Analytical HPR-20 TGA MS

A bench-top quadrupole mass spectrometer configured for use in conjunction with the DSC/TGA for continous analysis of gases and vapors.   The HPR-20 has a mass range of 200 amu, and detection capability from 100% to 100ppb.  The external scroll pump provides enhanced capability for light gases.

Hewlett Packard 6890 Series Gas Chromatograph

This system is fitted with a Flame Ionization Detector (FID) using Hydrogen and Air.  GC-FID is commonly used to analyze organic compounds.  Various column types can be fitted into the temperature controlled oven.  Standard GC syringe injection to introduce samples.

 
Perkin Elmer Clarus 500

This system is fitted with a Flame Ionization Detector (FID) using Hydrogen and Air.  GC-FID is commonly used to analyze organic compounds.  Various column types can be fitted into the temperature controlled oven.  Either an auto sampler or standard GC syringe injection can be used to introduce samples.

 

Thermo Fisher Nicolet IS50 FT-IR FTIR

Dual sources for mid and far IR spectroscopy, with built-in ATR for fast analsysis of powders, liquids, gels and pastes.  A wafer stage for automated measurements at multiple points on the surface.  A powerful analytical tool for chemical, pharmaceutical, materials analysis and Si wafer based materials analysis.

 
SRS CIS 200 sputter system RGA

A quadrapole mass spec with 1 to 100 amu range.  Better than 0.5 amu at 10% peak height.  Minimum detectable partial pressure of 5 x 10-11 Torr.  Attached to to the Aja sputter system and used for process gas analysis associated with sputter film deposition development.